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The CT-BW point-of-use abatement systems set global standards in waste gas abatement. They are highly efficient system used in CVD and etching applications for photovoltaic, semiconductor and related industries. As new process tools and technologies with highly corrosive gases and increasing gas loads are introduced, further improvements in abatement technologies are needed.
The CT-BW meets those requirements and is in compliance with international safety standards. Furthermore, it guarantees a high destruction removal efficiency for all waste gases from CVD and etching processes, especially for PFCs, as well as all kinds of solid and gaseous reaction by-products.
The system is designed for a reliable, resource-conserving performance even under harsh process conditions. The separation of the functional units, i.e. the burner, combustion chamber, wet scrubber, waste gas inlet and cooling system, allows a flexible setup for each application. The customized abatement configuration is key to keep the maintenance interval as long as possible and to maximize the uptime.
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